• Mayurika JB

MEMS has been identified as one of the most promising technologies for the 21st Century and has the potential to revolutionize both industrial and consumer products by combining silicon based microelectronics with micromachining technology. Its techniques and microsystem based devices have the potential to dramatically effect of all of our lives and the way we live. If semiconductor micro fabrication was seen to be the first micro manufacturing revolution, MEMS is the second revolution. This paper deals with the emerging field of micro-electromechanical systems, or MEMS and its applications and future scope. MEMS is a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimetres. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale.

MEMS, Applications, NEMS

"A Review Study on MEMS (Micro Electro Mechanical Systems)", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.3, Issue 8, page no.748-753, August 2016, Available :http://www.jetir.org/papers/JETIR1806494.pdf

"A Review Study on MEMS (Micro Electro Mechanical Systems)", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.3, Issue 8, page no. pp748-753, August 2016, Available at : http://www.jetir.org/papers/JETIR1806494.pdf