• G Mohanty
• -

The start of micro-fabrication technology in the integrated circuit (IC) industry is the new revolution of the latter part of the 20th century. Micro-fabrication technology currently plays a significant role in many engineering, mechanical, chemical and biomedical applications, and there are number of ways to fabricate the required microstructure in the micro meter scale. So the micro level fabrication and its integration is a challenging task for all scientific communities. In this review, a few basic micro-fabrication techniques for the development of a micro device are discussed briefly.

Micro-fabrication, MEMS, Cleaning process, Pattern transfer, Film deposition

"Fabrication Techniques For A Micro Device: A Review", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.5, Issue 12, page no.416-421, December 2018, Available :http://www.jetir.org/papers/JETIREB06048.pdf

"Fabrication Techniques For A Micro Device: A Review", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.5, Issue 12, page no. pp416-421, December 2018, Available at : http://www.jetir.org/papers/JETIREB06048.pdf