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Published in:

Volume 5 Issue 12
December-2018
eISSN: 2349-5162

Unique Identifier

JETIREB06048

Page Number

416-421

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Title

Fabrication Techniques For A Micro Device: A Review

ISSN

2349-5162

Cite This Article

"Fabrication Techniques For A Micro Device: A Review", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.5, Issue 12, page no.416-421, December 2018, Available :http://www.jetir.org/papers/JETIREB06048.pdf

Authors

Abstract

The start of micro-fabrication technology in the integrated circuit (IC) industry is the new revolution of the latter part of the 20th century. Micro-fabrication technology currently plays a significant role in many engineering, mechanical, chemical and biomedical applications, and there are number of ways to fabricate the required microstructure in the micro meter scale. So the micro level fabrication and its integration is a challenging task for all scientific communities. In this review, a few basic micro-fabrication techniques for the development of a micro device are discussed briefly.

Key Words

Micro-fabrication, MEMS, Cleaning process, Pattern transfer, Film deposition

Cite This Article

"Fabrication Techniques For A Micro Device: A Review", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.5, Issue 12, page no. pp416-421, December 2018, Available at : http://www.jetir.org/papers/JETIREB06048.pdf

Publication Details

Published Paper ID: JETIREB06048
Registration ID: 233642
Published In: Volume 5 | Issue 12 | Year December-2018
DOI (Digital Object Identifier):
Page No: 416-421
ISSN Number: 2349-5162

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Cite This Article

"Fabrication Techniques For A Micro Device: A Review", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.5, Issue 12, page no. pp416-421, December 2018, Available at : http://www.jetir.org/papers/JETIREB06048.pdf




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