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Published in:

Volume 3 Issue 7
July-2016
eISSN: 2349-5162

Unique Identifier

JETIR1607024

Page Number

112-115

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Title

Review:Microcantilever Fabrication Technology

ISSN

2349-5162

Cite This Article

"Review:Microcantilever Fabrication Technology", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.3, Issue 7, page no.112-115, July-2016, Available :http://www.jetir.org/papers/JETIR1607024.pdf

Abstract

Microelectromechanical systems or MEMS are integrated micro devices or systems combining electrical and mechanical components. The fast development of MEMS technology has brought many great ideas and development of physical, chemical and biological sensors. Microcantilevers are the most simplified device of MEMS. Moreover, the technology has been developed in the last few years for the fabrication of microcantilever as a sensing device. The sensing action essentially is the deflection of the cantilever beam. Conventional methods for fabricating micro-cantilevers are centered either etching in glass and silicon or using lithography. Given the emerging importance of microcantilever sensor, it is instructive to review the fabrication technology, and to examine new developments in the field.

Key Words

Microelectromechanical, microcantilever, Fabication technologies, substrate, planar technologies, Photolithography, etching, Surface micromachining, High-aspect-ratio micromachining, LIGA, laser micromachining, Replication Techniques,Micromoulding, hot embossing, Injection moulding

Cite This Article

"Review:Microcantilever Fabrication Technology", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.3, Issue 7, page no. pp112-115, July-2016, Available at : http://www.jetir.org/papers/JETIR1607024.pdf

Publication Details

Published Paper ID: JETIR1607024
Registration ID: 160337
Published In: Volume 3 | Issue 7 | Year July-2016
DOI (Digital Object Identifier):
Page No: 112-115
ISSN Number: 2349-5162

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Cite This Article

"Review:Microcantilever Fabrication Technology", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.3, Issue 7, page no. pp112-115, July-2016, Available at : http://www.jetir.org/papers/JETIR1607024.pdf




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