• Dr. T. S. Jayanthi
• Mr. S. S. Saravanakumar
• Mrs. S. Nagadeepa
• Dr. Subbiah Rammohan Chitra

A surface acoustic wave (SAW) gas sensor allows propagation of the wave through its surface piezoelectric materials. SAW devices are now frequently utilized. In a variety of fields due to their benefits characteristics such as a simple design, low cost, and superb performance, they may also be used in challenging environmental circumstances. Miniaturized Micro-Electro-Mechanical Systems, MEMS-based miniaturized gas sensors have several advantages such as low power, small size, and potential CMOS compatibility. A metal oxide semiconductor is a sensing technology that has a complex interaction with some types of gases such as changing the conductivity while adsorbing gas, giving two independent outputs, mass and resistance change of the material. The object of this work is to design a mass-sensitive transducer that can be integrated with the metal oxide semiconductor. An examination of the SAW gas sensor's materials, architecture design, and analysis of the SAW gas sensor are proposed in this paper. SAW devices were fabricated in commercial MEMS processes using piezoelectrical material such as Zinc oxide (ZnO), Tin Oxide (SnO2), and Barium titanate (BaTiO3) in form of polycrystalline material. This paper represents a comparative study of a SAW gas sensor with two different designs of interdigitated transducers (IDT) using different piezoelectric materials as a substrate with a sensing layer based on COMSOL Multiphysics 5.5 software to maximize its output. The first design has the shape rectangular (IDT) while the second design has the shape of an ellipse. The designed and the suggested Gas sensor architectures were modeled. The displacement of the surface and electric potential at various eigen frequencies at constant temperature 293K were investigated and contrasted with each other. In the case of gas sensor architectures, the layout which consists of elliptical IDTs offers better behavior as obtained from the material study. Barium titanate has a higher SAW velocity than other materials is 5700 m/s and high sensitivity which reaches 43 for rectangular design, and the elliptical design the sensitivity reaches 49. Regarding power consumption Barium titanate also has lower values for the rectangular and elliptical designs which are 35 mW and 30 mW respectively.

ZnO, SnO2, BaTiO3, SAW, IDTS, MEMS, COMSOL.

"SAW (Designing Surface Acoustic Wave) Gas Sensor Using Dissimilar MEMS Piezoelectrical Materials based on COMSOL - A Comparative Study", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.11, Issue 1, page no.g356-g373, January-2024, Available :http://www.jetir.org/papers/JETIR2401642.pdf

"SAW (Designing Surface Acoustic Wave) Gas Sensor Using Dissimilar MEMS Piezoelectrical Materials based on COMSOL - A Comparative Study", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.11, Issue 1, page no. ppg356-g373, January-2024, Available at : http://www.jetir.org/papers/JETIR2401642.pdf