• Shanky Saxena
• Ritu Sharma
• B.D. Pant
• Anuj Jain
• Sanjeet Kumar Sinha

Piezoelectric energy harvesters find applicability in remote area of application because of simple design and operation. MEMS process technology is utilized to fabricate these cantilever based structures. Piezoelectric layer length and thickness are the key parameters for controlling the resonance frequency and optimal output. In this paper the effect of length and thickness of the piezoelectric layer has been investigated. FEM results have been obtained for varying the length of piezoelectric layer from 50 to 200 µm for two different thicknesses of 2 and 5 µm. It has been observed the variation of the length of the piezoelectric layer has an effect on the total displacement of the cantilever which affects the net potential generated. As the thickness increases, the cantilever displacement decreases.

MEMS devices, piezoelectric energy harvesters, Thin film, Cantilevers.

"Piezoelectric Layer Length and Thickness variation effects on Displacement of Cantilever type Piezoelectric Energy Harvester", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.5, Issue 12, page no.858-862, December 2018, Available :http://www.jetir.org/papers/JETIREC06106.pdf

"Piezoelectric Layer Length and Thickness variation effects on Displacement of Cantilever type Piezoelectric Energy Harvester", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.5, Issue 12, page no. pp858-862, December 2018, Available at : http://www.jetir.org/papers/JETIREC06106.pdf