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Published in:

Volume 8 Issue 10
October-2021
eISSN: 2349-5162

UGC and ISSN approved 7.95 impact factor UGC Approved Journal no 63975

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Published Paper ID:
JETIRFD06026


Registration ID:
315684

Page Number

181-188

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Title

Design of a Pressure Display Interface System for MEMS Type Piezoresistive Pressure Sensors

Abstract

Foot plantar pressure measurement systems form an important class of pressure sensing systems which are popularly used in biomedical applications. Such pressure measurement systems generally have a number of sensors embedded in the plantar base or sole. Sensors could be working on the basis of different sensing mechanisms, among which piezoresistive sensing is considered to give optimum sensitivity, linearity & hysteresis. Piezoresistive sensors are generally based on Wheatstone bridge configuration which gives an advantage of eliminating the effect of temperature coefficient of resistance. This paper proposes a signal conditioning and digitization circuit for a single quarter Wheatstone bridge (WSB) built using strain gauge as well as for a group of six of them as a model for developing circuitry for foot plantar pressure measurement system. Trimming of sensor offset (around 1V) was done using potentiometer. Amplification was done using OP-AMP LF356 which provided a gain of 666, while Arduino Uno was used for Analog-to-digital signal conversion. The digitized data obtained was plotted using a program in MATLAB software. This circuit design was employed to obtain real time pressure plot of polyimide substrate based piezoresistive microcrystalline silicon pressure sensor with additional use of HX711 for signal conditioning. Signal conditioning involves techniques used to enhance the quality of the sensors output signals. The polyimide-based sensor was fabricated using hot-wire chemical vapor deposition (HWCVD) and patterned using photolithography on MJB SUSS4. The sensing material used here was aluminum induced crystallized silicon (AIC-Si) and the sensitivity of this sensor obtained was 77 mV/V/MPa.

Key Words

MEMS Piezoresistive Sensor, AIC-Silicon, Pressure sensor, Wheatstone bridge, Arduino Uno, MATLAB

Cite This Article

"Design of a Pressure Display Interface System for MEMS Type Piezoresistive Pressure Sensors", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.8, Issue 10, page no.181-188, October-2021, Available :http://www.jetir.org/papers/JETIRFD06026.pdf

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2349-5162 | Impact Factor 7.95 Calculate by Google Scholar

An International Scholarly Open Access Journal, Peer-Reviewed, Refereed Journal Impact Factor 7.95 Calculate by Google Scholar and Semantic Scholar | AI-Powered Research Tool, Multidisciplinary, Monthly, Multilanguage Journal Indexing in All Major Database & Metadata, Citation Generator

Cite This Article

"Design of a Pressure Display Interface System for MEMS Type Piezoresistive Pressure Sensors", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.8, Issue 10, page no. pp181-188, October-2021, Available at : http://www.jetir.org/papers/JETIRFD06026.pdf

Publication Details

Published Paper ID: JETIRFD06026
Registration ID: 315684
Published In: Volume 8 | Issue 10 | Year October-2021
DOI (Digital Object Identifier):
Page No: 181-188
Country: -, -, India .
Area: Engineering
ISSN Number: 2349-5162
Publisher: IJ Publication


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