• Diksha Dadaji Bodhe
• Dinesh V. Rojatkar

ABSTRACT MEMS is a Micro electro mechanical system. This paper deals with the field of micro-electromechanical system process-based technologies used to fabricate tiny integrated devices or system that integrate functionalities from different physical domains into one device. The product range in size from a few micrometers to millimeters. Such devices are fabricated using a wide range of technologies, having in common the ability to create structure with micro-and even nanometer accuracies. This system have the ability to sense, control and actual on the micro scale, and generate effects on the macro scale. This field is called by a wide variety of names in different parts of the world; micro electromechanical system (MEMS), micromechanics, Micro system technology (MST), micro machine. MEMS is a relatively new technology which exploits the existing microelectronics infrastructure to create complex machines with micron features sizes. These machine scan have many functions, including sensing, actuation and communication. Extensive application of these devices exists in both commercial and defense system. MEMS combine conventional semiconductor electronics with beams, gears, levers, switches, accelerometers, diaphragms, micro fluidic thrusters, and heat controllers, all of them microscopic in size.

MEMS, Micromachining, Inject printer head

"State of art of mems technology", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.4, Issue 1, page no.114-117, January-2017, Available :http://www.jetir.org/papers/JETIR1701017.pdf

"State of art of mems technology", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.4, Issue 1, page no. pp114-117, January-2017, Available at : http://www.jetir.org/papers/JETIR1701017.pdf