• MILAN N SIDDHAPURA
• MITUL M MAKWANA

Ultra-high vacuum (UHV) is high degree vacuum order of pressure lower than about 10−7 pascal or 10−9 torr (10−9 mbar). For UHV chamber gas load present are gas entering the volume through external and internal leaks, gas emanating from or passing through materials by diffusion and permeation. Permeation is a general phenomenon happens in the vacuum system where environmental gases permeates through the material. Knowledge of permeation is available for the standard materials, but it is not available to all the materials especially for the newly developed materials. Hence an experimental system is needed to be developed for the measurement of the permeation through various materials. The said system will also be useful for the gas load estimation in the compiles geometries and feed through the vacuum interfaces. Hence, an experimental system has been designed considering the UHV and material understanding and analyze against high pressure difference.

Ultra-high vacuum, Permeation measurement system, Permeation coefficient, Diffusion flux.

"DESIGN OF UHV COMPATIBLE PERMEATION MEASUREMENT SYSTEM.", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.5, Issue 6, page no.553-562, June-2018, Available :http://www.jetir.org/papers/JETIR1806204.pdf

"DESIGN OF UHV COMPATIBLE PERMEATION MEASUREMENT SYSTEM.", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.5, Issue 6, page no. pp553-562, June-2018, Available at : http://www.jetir.org/papers/JETIR1806204.pdf