UGC Approved Journal no 63975(19)

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Published in:

Volume 5 Issue 12
December-2018
eISSN: 2349-5162

UGC and ISSN approved 7.95 impact factor UGC Approved Journal no 63975

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Published Paper ID:
JETIR1812532


Registration ID:
193584

Page Number

199-203

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Title

MEMS Fabrication using LIGA Micromachining Process

Abstract

This paper studies on micro fabrication methods for MEMS. In the progression of MEMS, LIGA micromachining plays a very vital role. LIGA is abbreviated as Lithographie Galvanoformung Abformung which connotes Lithography, Electroplating and Molding in German language. Micro structures with high aspect ratio are fabricated using three stage micromachining process. LIGA micromachining technique is completely a different type of Bulk Micromachining. LIGA has ability to create 3-D structures as thick as Bulk Micromatching and has high design freedom as that of Surface Micromachining. LIGA is a hybrid Micromachining process that combines both bulk and Surface Micromachining Techniques.

Key Words

Micromachining, LIGA, Bulk, Surface Micromachining

Cite This Article

"MEMS Fabrication using LIGA Micromachining Process ", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.5, Issue 12, page no.199-203, December-2018, Available :http://www.jetir.org/papers/JETIR1812532.pdf

ISSN


2349-5162 | Impact Factor 7.95 Calculate by Google Scholar

An International Scholarly Open Access Journal, Peer-Reviewed, Refereed Journal Impact Factor 7.95 Calculate by Google Scholar and Semantic Scholar | AI-Powered Research Tool, Multidisciplinary, Monthly, Multilanguage Journal Indexing in All Major Database & Metadata, Citation Generator

Cite This Article

"MEMS Fabrication using LIGA Micromachining Process ", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.5, Issue 12, page no. pp199-203, December-2018, Available at : http://www.jetir.org/papers/JETIR1812532.pdf

Publication Details

Published Paper ID: JETIR1812532
Registration ID: 193584
Published In: Volume 5 | Issue 12 | Year December-2018
DOI (Digital Object Identifier):
Page No: 199-203
Country: Chittoor, Andhrapradesh, India .
Area: Engineering
ISSN Number: 2349-5162
Publisher: IJ Publication
Published Paper URL :: https://www.jetir.org/view?paper=JETIR1812532
Published Paper PDF: https://www.jetir.org/papers/JETIR1812532

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