• U. D. Lad
• N. S. Kokode
• U. J. Tupe

In the field of gas sensor annealing temperature is a one of the most important factor, which influences structural property, crystallinity of material and gas sensing property of film. Hence, the present work elaborate effect of annealing on the structural, electrical and gas sensing properties of ZnO thin film developed by using thermal evaporation technique. ZnO thin films were prepared on alumina substrate. Prepared samples S2 and S3 were annealed at temperature 450oC and 550oC respectively in a muffle furnace for 2 hours. S1 is un-annealed prepared sample. The resistivity of the developed thin films increased with the increasing annealing temperature. Structural characterizations of thin films were studied using SEM, EDS and XRD standard tools. At a different ambient temperature and gases, gas sensing properties of ZnO thin films were investigated. The sample S3 exhibits more sensitivity of 87.47% at 150 oC to NH3 gas with sudden response (~ 09 sec) and recovery (~ 12 sec) time.

Annealing temperature, ZnO, Thin films, crystallinity, Sensitivity, PPM.

"Influence of Annealing on Structural, Electrical and Gas Sensing Properties of Thermal Evaporated Nanocrystalline ZnO Thin Films", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.6, Issue 1, page no.1872-1878, January 2019, Available :http://www.jetir.org/papers/JETIR1901D68.pdf

"Influence of Annealing on Structural, Electrical and Gas Sensing Properties of Thermal Evaporated Nanocrystalline ZnO Thin Films", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.6, Issue 1, page no. pp1872-1878, January 2019, Available at : http://www.jetir.org/papers/JETIR1901D68.pdf