• Dr. B. Prathish Raaja
• J. Jeevanantham
• D. Vijayakumar

Worldwide coating some radical modifications in the climatic conditions due to that warming effect had by various greenhouse gases. The most harmful gas among them is Carbon dioxide and is increasing at an uncontrolled rate. This research study aims at getting better out the sum of the major polluting gas carbon dioxide. The sensor mechanism by adsorbing the CO2 molecules on ZnO sensing layer, which modifies the overall volume of the detector. The construction is a MEMS cantilever beam, holding its own resonant frequency. To selectively adsorb CO2 molecules from the mixture of gaseous molecules, ZnO at a specific temperature is applied. Every bit the gas atoms are adsorbed the mass increases and hence there is a change in resonant frequency. This alteration in frequency gives the criterion of the amount of CO2 molecules present in that environment. The major expected advantage of this technique would be the reputability of the sensor that is employed. This Quantitative analysis of CO2 would be helpful to mankind by alerting them about the environment in which they operate, by proper conditioning and networking.

MEMS Cantilever, Resonant Frequency, Atmospheric gas sensing

"Resonance based MEMS cantilever beam sensor for atmospheric gas ", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.6, Issue 2, page no.195-199, February-2019, Available :http://www.jetir.org/papers/JETIR1902830.pdf

"Resonance based MEMS cantilever beam sensor for atmospheric gas ", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.6, Issue 2, page no. pp195-199, February-2019, Available at : http://www.jetir.org/papers/JETIR1902830.pdf