• K.Karuppasamy
• Dr.S.Muruganand
• N.Manikandan

Nanostructured ZnO thin film become prepared through RF reactive magnetron sputtering and characterized through X-ray diffraction, SEM, FT-IR spectroscopy, measurements. Under the situations employed, the sputtered ZnO film become located to be polycrystalline with grain length various among 70 and 100 nm with a small area (1.36 mm 0.55 mm). The absorption and photoluminescence spectral data indicated the presence of defects withinside the shape of zinc interstitials and oxygen vacancies which can sell adsorption of gaseous species. Impedance approach become used to affirm adsorption of water vapor onto the sensor film. The chemiresistor sensor confirmed almost a 4 order variant in resistance withinside the relative humidity variety among 11% and 95% with a reaction and recuperation time of round 15 and 40 m seconds respectively. The tool exhibited excessive balance providing scope for growing a realistic humidity sensor.

Sputtered zinc oxide Humidity sensor Chemi resistor Adsorption of water vapor

"Development of defect mediated ZnO Thin Film For Humidity Sensing Application", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.6, Issue 3, page no.401-413, March-2019, Available :http://www.jetir.org/papers/JETIR1903M49.pdf

"Development of defect mediated ZnO Thin Film For Humidity Sensing Application", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.6, Issue 3, page no. pp401-413, March-2019, Available at : http://www.jetir.org/papers/JETIR1903M49.pdf