• Pankaj Varshney
• Dr.Sandip Mahajan
• Dr.Ramphal Sharma

Pure ZnO and Mn doped thin films were fabricated on glass substrates by DC co-sputtering method for magnetic and gas sensor applications. Pure and doped thin films were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The results of pure and doped thin films were also compared to investigate for improvement of magnetic and gas sensing properties. Pure and Mn doped ZnO both thin films had a hexagonal wurtzite structure with a (0 0 2) preferred orientation. From SEM results, it was seen that Mn doped ZnO thin film shows circular morphology. The Mn doped ZnO thin film exhibits enhancement in sensing properties towards the ammonia gas compared to pure ZnO through the whole detection range (20-1000 ppm). The proposed sensor is capable to detect the ammonia gas down to 20 ppm level at working temperature of 250 °C. The Mn doped ZnO sensor displays a considerably high sensing response (S.R ~23 %) towards ammonia gas at 200 ppm level with a very fast response and recovery times of few seconds. The working principle and sensing mechanism of the proposed sensor was also studied in detail. Furthermore, we have demonstrated the variation in the response for ammonia gas under different humidity conditions (0-60% RH) at the optimum temperature (250 ºC). Therefore, the present work opens a new possibility to design the remarkable ammonia gas sensor at low temperatures. The ferromagnetic behavior is presented in both pure and doped samples.

DC sputtering; doped; ammonia sensor, ferromagnetic

"Comparative studies of Pure and Mn doped ZnO thin film for gas sensor and Magnetic applications ", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.6, Issue 5, page no.321-332, May-2019, Available :http://www.jetir.org/papers/JETIR1905Q44.pdf

"Comparative studies of Pure and Mn doped ZnO thin film for gas sensor and Magnetic applications ", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.6, Issue 5, page no. pp321-332, May-2019, Available at : http://www.jetir.org/papers/JETIR1905Q44.pdf