• Priyanka Gautam
• Dr. Dheeraj Jain

In this paper unimorphs has been designed in COMSOL Multiphysics 3.5 in 3D view Thin film piezoelectric materials offer a number of advantages in microelectro mechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available energy densities, as well as high sensitivity sensors with wide dynamic ranges, and low power requirements. a Multiphysics 3.5 in 3D view to decrease operating frequency and improve output power. Unimorphs are designed with two different nonpiezoelectric materials as Aluminum and Gold. Eigen frequency analysis has been performed to obtain resonant frequency and generated voltage from the unimorphs with different piezoelectric epitaxial thin film. Unimorphs of dimension 100mm×30mm×4mm has been modeled with 2mm thin film epitaxial layer of piezoelectric material. From the simulation results Gold is preferred over Aluminium as about 100Hz less frequency response is observed. A Unimorph with gold and PZT-5A material is considered the best model with resonance frequency of about 160Hz with generated electric voltage of 107 volts is applied at the tip of unimorph. spiral cantilever is designed to achieve compactness, low resonant frequency and minimum damping coefficient, simultaneously.

MEMS. Aluminium nitride,Tellurium Dioxide,Gallium Arsenide,Lithium NiobatePZT-5APZT-5H

"Modeling and Simulation of MEMS Device Based on Epitaxial Piezoelectric Thin Film", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.6, Issue 6, page no.42-47, June 2019, Available :http://www.jetir.org/papers/JETIR1907P06.pdf

"Modeling and Simulation of MEMS Device Based on Epitaxial Piezoelectric Thin Film", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.6, Issue 6, page no. pp42-47, June 2019, Available at : http://www.jetir.org/papers/JETIR1907P06.pdf