• K. S. Thakare
• S. J. Patil
• R. R. Ahire

Tin oxide has been a very promising material due to its properties like mechanical hardness, stability to heat treatment etc. Addition of impurities (dopants) improves the film quality as well as their chemical properties. In this paper, the preparation of cadmium doped tin oxide, their properties like electrical and gas sensing are explained. The cadmium doped tin oxide thin film samples have been prepared by the Physical Vapour Deposition technique and annealed at 300ºC, 400ºC and 500ºC. Those annealed at 400ºC were considered for all further characterizations, since they showed better results compared to those annealed at other temperatures. The so prepared film samples were then characterized for structural, morphological and electrical characterization for gas sensing. Locally fabricated Static Gas Sensing system was employed to study the electrical as well as gas sensing properties of the film samples. The film samples showed better responses for ethanol vapours over target gases like carbon dioxide, ammonia, chlorine, acetone vapours etc.

Cd-doped tin oxide, doping, PVD technique, gas sensing, Tin oxide.

"Electrical and Gas Sensing Properties of Cd-doped SnO2 thin films using PVD Technique", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.7, Issue 11, page no.975-980, November-2020, Available :http://www.jetir.org/papers/JETIR2011409.pdf

"Electrical and Gas Sensing Properties of Cd-doped SnO2 thin films using PVD Technique", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.7, Issue 11, page no. pp975-980, November-2020, Available at : http://www.jetir.org/papers/JETIR2011409.pdf