UGC Approved Journal no 63975

ISSN: 2349-5162 | ESTD Year : 2014
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Published in:

Volume 6 Issue 2
February-2019
eISSN: 2349-5162

UGC and ISSN approved 7.95 impact factor UGC Approved Journal no 63975

7.95 impact factor calculated by Google scholar

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Published Paper ID:
JETIREV06084


Registration ID:
311829

Page Number

525-529

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Title

Review on Lithography Techniques

Abstract

This article examines important technology and applications in micro and nanolithography’s from industrial micro devices to novel nanotechnology and scientific applications. The main technique in the production of integrated circuits and microchips was micro- and nanolithography’s across the semiconductive sector. Such technology also drives nanotechnology advances to revolutionize. The methods of lithography include UV-lithography, lithography based on electron beam as well as soft lithograph and scan samples techniques. In addition, its applications are split into four important sectors, namely microelectronics as well as systems of microscale size, biomedical as well as biotechnology, optical, as well as energy as well as climate production.

Key Words

Fabrication, Lithography, Microlithography, Nanoscale lithography, Scanning Probe.

Cite This Article

"Review on Lithography Techniques", International Journal of Emerging Technologies and Innovative Research (www.jetir.org), ISSN:2349-5162, Vol.6, Issue 2, page no.525-529, February-2019, Available :http://www.jetir.org/papers/JETIREV06084.pdf

ISSN


2349-5162 | Impact Factor 7.95 Calculate by Google Scholar

An International Scholarly Open Access Journal, Peer-Reviewed, Refereed Journal Impact Factor 7.95 Calculate by Google Scholar and Semantic Scholar | AI-Powered Research Tool, Multidisciplinary, Monthly, Multilanguage Journal Indexing in All Major Database & Metadata, Citation Generator

Cite This Article

"Review on Lithography Techniques", International Journal of Emerging Technologies and Innovative Research (www.jetir.org | UGC and issn Approved), ISSN:2349-5162, Vol.6, Issue 2, page no. pp525-529, February-2019, Available at : http://www.jetir.org/papers/JETIREV06084.pdf

Publication Details

Published Paper ID: JETIREV06084
Registration ID: 311829
Published In: Volume 6 | Issue 2 | Year February-2019
DOI (Digital Object Identifier):
Page No: 525-529
Country: -, -, India .
Area: Engineering
ISSN Number: 2349-5162
Publisher: IJ Publication


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